X‐pinch soft x‐ray source for microlithography
作者:
D. A. Hammer,
D. H. Kalantar,
K. C. Mittal,
N. Qi,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 57,
issue 20
页码: 2083-2085
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.103948
出版商: AIP
数据来源: AIP
摘要:
A novel soft x‐ray source for submicron resolution lithography is described. Exploratory experiments with thex‐pinch dense plasma radiation source have been performed using a 500 kA, 40 ns pulsed power generator. About 33 J of magnesiumK‐shell radiation (1.3–1.5 keV) and 10 J of aluminumK‐shell radiation (1.6–1.7 keV) have been produced in a source approximately 0.5 mm or less in diameter during a single pulse. The yield increased rapidly with current, implying the possibility of exposing a resist at a distance of 40 cm using a<750 kA pulser in as few as ten pulses.
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