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Photoinduced synthesis of porous silicon without anodization

 

作者: O. K. Andersen,   T. Frello,   E. Veje,  

 

期刊: Journal of Applied Physics  (AIP Available online 1995)
卷期: Volume 78, issue 10  

页码: 6189-6192

 

ISSN:0021-8979

 

年代: 1995

 

DOI:10.1063/1.360564

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An easy and very reproducible method to produce porous silicon by light‐stimulated etching of crystalline silicon in HF is described, and the formation mechanism is discussed in terms of carrier diffusion and band bending near the surface. The method avoids the use of electrodes and electrochemical etching. The photosynthesized porous silicon shows bright photoluminescence. Spectra recorded at room temperature forn‐type as well asp‐type silicon are presented. ©1995 American Institute of Physics.

 

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