Automated parallel high-speed atomic force microscopy
作者:
S. C. Minne,
G. Yaralioglu,
S. R. Manalis,
J. D. Adams,
J. Zesch,
A. Atalar,
C. F. Quate,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 72,
issue 18
页码: 2340-2342
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.121353
出版商: AIP
数据来源: AIP
摘要:
An expandable system has been developed to operate multiple probes for the atomic force microscope in parallel at high speeds. The combined improvements from parallelism and enhanced tip speed in this system represent an increase in throughput by over two orders of magnitude. A modular cantilever design has been replicated to produce an array of 50 cantilevers with a 200 &mgr;m pitch. This design contains a dedicated integrated sensor and integrated actuator where the cells can be repeated indefinitely. Electrical shielding within the array virtually eliminates coupling between the actuators and sensors. The reduced coupling simplifies the control electronics, facilitating the design of a computer system to automate the parallel high-speed arrays. This automated system has been applied to four cantilevers within the array of 50 cantilevers, with a 20 kHz bandwidth and a noise level of less than 50 Å. For typical samples, this bandwidth allows us to scan the probes at 4 mm/s. ©1998 American Institute of Physics.
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