Fabrication of high mobility two‐dimensional electron and hole gases in GeSi/Si
作者:
Y. H. Xie,
E. A. Fitzgerald,
D. Monroe,
P. J. Silverman,
G. P. Watson,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 73,
issue 12
页码: 8364-8370
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.353429
出版商: AIP
数据来源: AIP
摘要:
A procedure for the fabrication of two‐dimensional carrier (electron and hole) gases in modulation doped GeSi/Si heterostructures is presented. The best 4.2 K mobilities measured for the two‐dimensional electron and hole gases are 180 000 cm2/V s and 18 000 cm2/V s, respectively. Recently, two‐dimensional hole gases with mobilities as high as 55 000 cm2/V s have been obtained. The carrier gases are fabricated on top of relaxed, compositionally graded GexSi1−xbuffer layers with low threading dislocation densities (≊106cm−2). Experimental evidence indicates that the function of the graded buffer is to promote dislocation propagation while suppressing nucleation. A comparative analysis is carried out for two dimensional electron gases in GeSi/Si/GeSi and in AlGaAs/GaAs structures. Although molecular beam epitaxy is used to grow the samples, the principle discussed here is independent of growth technique.
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