The selectivity and sensitivity of deep level transient spectroscopy (DLTS) depend significantly on the choice of the correlation function. In this article, the factors limiting the resolution of correlation DLTS are discussed. It is argued that the weighting functions reported to date provide asymmetrical rate windows, being effective filters only for slow transients. To overcome this limit, a correlation procedure, based on the Gaver–Stehfest algorithm for the inverse Laplace transformation, is proposed. Using this procedure one can obtain a temperature scanned DLTS mode resolution comparable to the resolution of sophisticated methods of inversion of the Laplace integral equation. ©1997 American Institute of Physics.