Strained Si1−xGexmulti‐quantum well waveguide structures on (110) Si
作者:
K. Bernhard‐Ho¨fer,
A. Zrenner,
J. Brunner,
G. Abstreiter,
F. Wittmann,
I. Eisele,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 66,
issue 17
页码: 2226-2228
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.113174
出版商: AIP
数据来源: AIP
摘要:
Pseudomorphic Si1−xGex/Si multi‐quantum well structures for waveguide applications have been grown on (110) Si by molecular beam epitaxy. In a series of samples the Ge fractionxhas been varied fromx=0.25 tox=0.37 andx=0.50, respectively. We have used photocurrent spectroscopy on mesa diodes to demonstrate that the absorption edge of the strained Si1−xGexquantum wells can be tuned from 1.3 to 1.55 &mgr;m by the Ge fractionx. Realization and characterization of single‐mode (110) Si1−xGexrib waveguides with end facets of high optical quality, prepared by cleaving, is reported. ©1995 American Institute of Physics.
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