The influence of the deformation on the two-dimensional electron gas density in GaN–AlGaN heterostructures
作者:
R. Gaska,
J. W. Yang,
A. D. Bykhovski,
M. S. Shur,
V. V. Kaminski,
S. M. Soloviov,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 72,
issue 1
页码: 64-66
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.120645
出版商: AIP
数据来源: AIP
摘要:
We report on the effect of external strain on the two-dimensional electron gas density in AlGaN/GaN heterostructures grown on sapphire by low pressure metalorganic chemical vapor deposition. The electron sheet concentration in the studied samples was4×1012–2×1013 cm−2and decreased with compressive strain. Lower doped heterostructures had a higher sensitivity to applied strain. The comparison between the experimental data and our model shows that the GaN layers are primarily nitrogen terminated at the heterointerface. ©1998 American Institute of Physics.
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