Back-illuminated GaN/AlGaN ultraviolet (UV) heterojunction photodiodes with high quantum efficiencies are demonstrated. Photovoltaic (zero bias) responsivity of 0.2 A/W at 355 nm was achieved. The improved efficiencies primarily arise from the use of AlGaN/GaN heterojunction in which photons are absorbed within thep-njunction thus eliminates carrier losses due to surface recombination and diffusion processes in previously reported homojunction devices. Very high dark impedance and large visible rejection ratio were obtained. These results indicate high quality GaN/AlGaN interface and efficient photocarrier collection in the photodiode. ©1998 American Institute of Physics.