Breakdown measurement of a capacitive radio frequency discharge with insulated electrode
作者:
Masafumi Shoji,
Masumi Sato,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 23
页码: 3362-3363
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.120337
出版商: AIP
数据来源: AIP
摘要:
Breakdown voltages of a capacitively coupled radio frequency nitrogen discharge at 13.56 MHz are measured using an insulated electrode system made from glass-covered aluminum disk plates. The breakdown voltages measured against the gas pressure exhibit typical V-shaped characteristics without peculiar sharp bend in the left branch of the minimum of the curve appearing in a low pressure region when metal electrodes are employed. The observed results are compared with the theoretical calculation based on the electron diffusion and mobility-controlled model, and a satisfactory agreement is found except for the precise prediction of the location of the minimum point. ©1997 American Institute of Physics.
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