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Breakdown measurement of a capacitive radio frequency discharge with insulated electrode

 

作者: Masafumi Shoji,   Masumi Sato,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 23  

页码: 3362-3363

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.120337

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Breakdown voltages of a capacitively coupled radio frequency nitrogen discharge at 13.56 MHz are measured using an insulated electrode system made from glass-covered aluminum disk plates. The breakdown voltages measured against the gas pressure exhibit typical V-shaped characteristics without peculiar sharp bend in the left branch of the minimum of the curve appearing in a low pressure region when metal electrodes are employed. The observed results are compared with the theoretical calculation based on the electron diffusion and mobility-controlled model, and a satisfactory agreement is found except for the precise prediction of the location of the minimum point. ©1997 American Institute of Physics.

 

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