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A proposal for maskless, zone‐plate‐array nanolithography

 

作者: Henry I. Smith,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1996)
卷期: Volume 14, issue 6  

页码: 4318-4322

 

ISSN:1071-1023

 

年代: 1996

 

DOI:10.1116/1.589044

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

We propose a novel form of x‐ray projection lithography that: (1) requires no mask, and hence can be considered an x‐ray pattern generator; (2) is, in principle, capable of reaching the limits of the lithographic process. The new scheme utilizes an array of Fresnel zone plates, and matrix‐addressed micromechanical shutters to turn individual x‐ray beamlets on or off in response to commands from a control computer. Zone plate resolution is approximately equal to the minimum zone width, which can approach 10 nm. Zone plates are narrow‐band lensing elements: For a diffraction limited focus, the source bandwidth Δλ/λ should be less than or equal to the reciprocal of the number of zonesN. An undulator havingNumagnetic sections emits collimated radiation in a bandwidth Δλ/λ=1/Nu.Nuis usually in the range 35–100. We present a system design based on 25 nm lithographic resolution using λ=4.5 nm. ForN=100 the zone‐plate diameter is 10 μm. Each zone plate of the array would be responsible only for exposure within its ‘‘unit cell.’’ To fill in a full pattern, the stage holding the sample would be scanned inXandYwhile the beamlets are multiplexed on and off. A microundulator designed for installation on a commercial compact synchrotron can provide 87 mW within a 2% bandwidth around 4.5 nm in a divergence cone of 0.28 mrad. The calculated efficiency of first‐order focus for a zone plate operating at 4.5 nm is 31%, using 130 nm of spent U as the absorber/phase shifter. An exposure rate of ∼1 cm2/s at 25 nm resolution appears feasible.

 

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