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A demonstration of low voltage performance, from scaled PLZT films, on a fully integrated 64K FRAM®

 

作者: Brian Eastep,   James Macwilliams-Brooks,   James Humes,   Sanjay Mitra,  

 

期刊: Integrated Ferroelectrics  （Taylor Available online 1999）
卷期: Volume 27, issue 1-4  

页码: 315-324

 

ISSN:1058-4587

 

年代: 1999

 

DOI:10.1080/10584589908228477

 

出版商: Taylor & Francis Group

 

关键词: Ferroelectric;PLZT;Scaling;Platinum;SOIC;Calcium;Strontium;64K FRAM®

 

数据来源: Taylor

 

摘要:

One of the prevailing concerns regarding the PLZT based system has been in its scalability for low voltage operation. Through process enhancements, a sputtered PLZT film with Calcium and Strontium dopants, has been optimized on a platinum electrode system and scaled for low voltage operation. This paper will present general background data covering the optimization of the Ferroelectric film and SOIC “Plastic” package results for a fully integrated 64k FRAM® incorporating this film.

 

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