Spinning Rotor Pressure Gauge
作者:
J. W. Beams,
D. M. Spitzer,
J. P. Wade,
期刊:
Review of Scientific Instruments
(AIP Available online 1962)
卷期:
Volume 33,
issue 2
页码: 151-155
ISSN:0034-6748
年代: 1962
DOI:10.1063/1.1746520
出版商: AIP
数据来源: AIP
摘要:
A magnetically suspended rotor pressure gauge is described for measuring pressures below 10−4torr. The data are in good agreement with those obtained with a calibrated Alpert ionization gauge over the range 10−4to 5×10−8torr. When the gas in the vacuum system was frozen out with liquid helium, the rotor gauge recorded a residual pressure of about 5×10−10torr. A brief discussion is given of a number of effects which unless eliminated may introduce errors into the measurements at the lowest pressures.
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