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Spinning Rotor Pressure Gauge

 

作者: J. W. Beams,   D. M. Spitzer,   J. P. Wade,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1962)
卷期: Volume 33, issue 2  

页码: 151-155

 

ISSN:0034-6748

 

年代: 1962

 

DOI:10.1063/1.1746520

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A magnetically suspended rotor pressure gauge is described for measuring pressures below 10−4torr. The data are in good agreement with those obtained with a calibrated Alpert ionization gauge over the range 10−4to 5×10−8torr. When the gas in the vacuum system was frozen out with liquid helium, the rotor gauge recorded a residual pressure of about 5×10−10torr. A brief discussion is given of a number of effects which unless eliminated may introduce errors into the measurements at the lowest pressures.

 

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