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Optical techniques for composition measurement of bulk and thin‐film Cd1−yZnyTe

 

作者: S. M. Johnson,   S. Sen,   W. H. Konkel,   M. H. Kalisher,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1991)
卷期: Volume 9, issue 3  

页码: 1897-1901

 

ISSN:1071-1023

 

年代: 1991

 

DOI:10.1116/1.585378

 

出版商: American Vacuum Society

 

关键词: (CdZn)Te

 

数据来源: AIP

 

摘要:

The composition of high‐quality single‐crystal bulk‐grown Cd1−yZnyTe (0≤y≤0.2) was determined from precision lattice constant measurements for a total of 22 data points. These samples were used to develop calibration curves for an accurate, contactless, nondestructive optical determination of composition using either 300 K transmission measurements or 77 K photoluminescence measurements. The 300 K transmission technique is useful for bulk CdZnTe wafers while the 77 K PL technique is applicable to both bulk and thin‐film CdZnTe. Both techniques are useful in determining Cd1−yZnyTe composition in the range (0≤y≤0.2) which covers the range needed for lattice‐matching to Hg1−xCdxTe and Hg1−xZnxTe epitaxial layers. The ability to map sample composition with high precision is available with both techniques.

 

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