Optical techniques for composition measurement of bulk and thin‐film Cd1−yZnyTe
作者:
S. M. Johnson,
S. Sen,
W. H. Konkel,
M. H. Kalisher,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1991)
卷期:
Volume 9,
issue 3
页码: 1897-1901
ISSN:1071-1023
年代: 1991
DOI:10.1116/1.585378
出版商: American Vacuum Society
关键词: (CdZn)Te
数据来源: AIP
摘要:
The composition of high‐quality single‐crystal bulk‐grown Cd1−yZnyTe (0≤y≤0.2) was determined from precision lattice constant measurements for a total of 22 data points. These samples were used to develop calibration curves for an accurate, contactless, nondestructive optical determination of composition using either 300 K transmission measurements or 77 K photoluminescence measurements. The 300 K transmission technique is useful for bulk CdZnTe wafers while the 77 K PL technique is applicable to both bulk and thin‐film CdZnTe. Both techniques are useful in determining Cd1−yZnyTe composition in the range (0≤y≤0.2) which covers the range needed for lattice‐matching to Hg1−xCdxTe and Hg1−xZnxTe epitaxial layers. The ability to map sample composition with high precision is available with both techniques.
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