Determination of molecular beam epitaxial growth parameters by ellipsometry
作者:
R. Droopad,
C. H. Kuo,
S. Anand,
K. Y. Choi,
G. N. Maracas,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1994)
卷期:
Volume 12,
issue 2
页码: 1211-1213
ISSN:1071-1023
年代: 1994
DOI:10.1116/1.587046
出版商: American Vacuum Society
关键词: GALLIUM ARSENIDES;MOLECULAR BEAM EPITAXY;ELLIPSOMETRY;GROWTH RATE;CHEMICAL COMPOSITION;TEMPERATURE EFFECTS;DESORPTION;ACTIVATION ENERGY;GaAs
数据来源: AIP
摘要:
The use of ellipsometry as an alternative technique forinsitudetermination of molecular beam epitaxial growth parameters has been demonstrated. Epitaxial growth has been monitored in real time using three discrete wavelengths to extract growth rates and alloy composition. The effect of substrate rotation on the measured growth rates has also been determined by this technique. From measurements of the GaAs growth rates versus substrate temperature, a value of 4.68±0.12 eV for the activation energy for Ga desorption during GaAs growth was obtained. This agrees with values obtained by other measurement techniques.
点击下载:
PDF
(266KB)
返 回