Effects of heat treatment on the optical and electrical properties of indium–tin oxide films
作者:
William G. Haines,
Richard H. Bube,
期刊:
Journal of Applied Physics
(AIP Available online 1978)
卷期:
Volume 49,
issue 1
页码: 304-307
ISSN:0021-8979
年代: 1978
DOI:10.1063/1.324386
出版商: AIP
数据来源: AIP
摘要:
The effect of heat treatment in various environments on the electrical and optical properties of indium–tin oxide (ITO) sputtered films has been investigated. As the resistivity is decreased by heat treatment in H2from 8.3×10−3to 4.3×10−4&OHgr; cm, the optical band gap increases from 3.05 to 3.42 eV consistent with a Burstein shift and intrinsic band gap of 2.98 eV, and for resistivities less than 8.3×10−4&OHgr; cm there is a rapid decrease in transmission at longer wavelengths due to free‐carrier absorption and formation of dendritic precipitates. Careful control over all sputtering variables is essential to obtain reproducible properties.
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