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Formation of Ohmic contacts in semiconducting oxides

 

作者: J. Narayan,   V. N. Shukla,  

 

期刊: Journal of Applied Physics  (AIP Available online 1980)
卷期: Volume 51, issue 6  

页码: 3444-3446

 

ISSN:0021-8979

 

年代: 1980

 

DOI:10.1063/1.328032

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new technique based on deposition of metallic film at room temperature followed by laser irradiation, for the formation of Ohmic Contacts on semiconducting oxides, has been developed. Aluminum or nickel film about 1 &mgr;m thick was deposited onn‐type polycrystalline barium titanate (BaTi03) substrates and irradiated withQ‐switched ruby laser pulses. This technique produces low‐resistance Ohmic contacts which do not age and remain stable over a wide temperature range.

 

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