Formation of Ohmic contacts in semiconducting oxides
作者:
J. Narayan,
V. N. Shukla,
期刊:
Journal of Applied Physics
(AIP Available online 1980)
卷期:
Volume 51,
issue 6
页码: 3444-3446
ISSN:0021-8979
年代: 1980
DOI:10.1063/1.328032
出版商: AIP
数据来源: AIP
摘要:
A new technique based on deposition of metallic film at room temperature followed by laser irradiation, for the formation of Ohmic Contacts on semiconducting oxides, has been developed. Aluminum or nickel film about 1 &mgr;m thick was deposited onn‐type polycrystalline barium titanate (BaTi03) substrates and irradiated withQ‐switched ruby laser pulses. This technique produces low‐resistance Ohmic contacts which do not age and remain stable over a wide temperature range.
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