New method of light‐induced deposition of metal films on insulator‐on‐semiconductor substrates
作者:
S. K. Krawczyk,
S. N. Kumar,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 50,
issue 4
页码: 215-217
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.97665
出版商: AIP
数据来源: AIP
摘要:
We show in this work that the internal photoemission at the semiconductor‐insulator interface in the semiconductor‐insulator‐electrolyte system can be used to initiate localized chemical reactions at the insulator‐electrolyte interface. Using this concept, successful depositions of Cu and Ni films have been obtained on oxidized Si wafers. We have also found that the activation of the SiO2surface with Pd atoms results in an efficient electron transfer at the SiO2‐electrolyte interface and improves the adhesion of the deposited metal.
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