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Super‐resolution through illumination by diffraction‐born evanescent waves

 

作者: John M. Guerra,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 66, issue 26  

页码: 3555-3557

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.113814

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A diffraction grating in silicon with 50 nm lines and spaces is illuminated with diffraction‐born evanescent waves from its transparent replica. A rotation &fgr; between the gratings results in a set of fringes with period &lgr;fthat is larger than the period of the original gratings by a magnification factorM. These fringes are induced and observed with a photon tunneling microscope having an incident illumination of 650 nm in air. This super‐resolution by what may be considered a form of optical heterodyning with evanescent waves is discussed. ©1995 American Institute of Physics.

 

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