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On the optimization of ion microprobes

 

作者: Zhifeng Shao,   Y. L. Wang,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1990)
卷期: Volume 8, issue 1  

页码: 95-99

 

ISSN:0734-211X

 

年代: 1990

 

DOI:10.1116/1.584835

 

出版商: American Vacuum Society

 

关键词: ION MICROSCOPY;ION PROBES;OPTIMIZATION;ELECTRIC CURRENTS;BEAM OPTICS;PARAMETRIC ANALYSIS;CHROMATIC ABERRATIONS

 

数据来源: AIP

 

摘要:

The size of an ion probe is determined by many different factors such as virtual source size, magnification, probe current, and aberrations of its optical column. While operating or designing an ion optical system, it is often desirable to choose these parameters such that the optimum probe is obtained for the anticipated application. In this paper, we propose a routine which could be used to find the optimum magnification and aberrations of a system for given ion source parameters and probe requirements.

 

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