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Microfabrication of near‐field optical probes

 

作者: A. G. T. Ruiter,   M. H. P. Moers,   N. F. van Hulst,   M. de Boer,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1996)
卷期: Volume 14, issue 2  

页码: 597-601

 

ISSN:1071-1023

 

年代: 1996

 

DOI:10.1116/1.589142

 

出版商: American Vacuum Society

 

关键词: PROBES;OPTICAL MICROSCOPES;SILICON NITRIDES;SPATIAL RESOLUTION;Si3N4

 

数据来源: AIP

 

摘要:

Near‐field optical microscopy generally uses a tapered optical fiber, which is metal coated, to form a sub‐wavelength sized light source. Here, a technique for the fabrication of a new type of probe is described. The new design is based on atomic force microscope probes and consists of a silicon nitride cantilever with a solid transparent conical tip. The probes are made using micromechanical techniques, which allow batch fabrication of the probes. A near‐field scanning optical microscope system was built to test the probes. This system features force detection by a beam deflection technique and subsequent force feedback together with a conventional optical microscope. A major advantage of the apparatus is the ease at which images are obtained. Results on a test sample show that an optical resolution of 300 nm can be obtained together with a simultaneous height image.

 

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