Microfabrication of near‐field optical probes
作者:
A. G. T. Ruiter,
M. H. P. Moers,
N. F. van Hulst,
M. de Boer,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1996)
卷期:
Volume 14,
issue 2
页码: 597-601
ISSN:1071-1023
年代: 1996
DOI:10.1116/1.589142
出版商: American Vacuum Society
关键词: PROBES;OPTICAL MICROSCOPES;SILICON NITRIDES;SPATIAL RESOLUTION;Si3N4
数据来源: AIP
摘要:
Near‐field optical microscopy generally uses a tapered optical fiber, which is metal coated, to form a sub‐wavelength sized light source. Here, a technique for the fabrication of a new type of probe is described. The new design is based on atomic force microscope probes and consists of a silicon nitride cantilever with a solid transparent conical tip. The probes are made using micromechanical techniques, which allow batch fabrication of the probes. A near‐field scanning optical microscope system was built to test the probes. This system features force detection by a beam deflection technique and subsequent force feedback together with a conventional optical microscope. A major advantage of the apparatus is the ease at which images are obtained. Results on a test sample show that an optical resolution of 300 nm can be obtained together with a simultaneous height image.
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