Transition from relaxed to derelaxed amorphous silicon: Optical characterization
作者:
R. Reitano,
M. G. Grimaldi,
P. Baeri,
E. Bellandi,
S. Borghesi,
G. Baratta,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 74,
issue 4
页码: 2850-2855
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.354637
出版商: AIP
数据来源: AIP
摘要:
Optical constants of relaxed, derelaxed, and partially relaxed amorphous silicon (a‐Si) in the range 0.4–0.9 &mgr;m are reported. The thermodynamical state of amorphous silicon (a‐Si) has been changed either by thermal treatments or low dose ion implantation. Ellipsometry has been used to evaluate the complex refractive index for several amorphous states with enthalpy content between that of the fully relaxed and fully derelaxeda‐Si. We observed a strong correlation between the electronic structure as probed by our optical measurements and the topological short‐range order as probed by Raman scattering.
点击下载:
PDF
(717KB)
返 回