首页   按字顺浏览 期刊浏览 卷期浏览 Microscopic picture of Si(113): A novel surface reconstruction, the origin of defects, ...
Microscopic picture of Si(113): A novel surface reconstruction, the origin of defects, and the process of adsorption. Theoretical and experimental study

 

作者: J. Da̧browski,   H.‐J. Müssig,   G. Wolff,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1995)
卷期: Volume 13, issue 4  

页码: 1597-1601

 

ISSN:1071-1023

 

年代: 1995

 

DOI:10.1116/1.587863

 

出版商: American Vacuum Society

 

关键词: SILICON;SURFACE RECONSTRUCTION;SURFACE STRUCTURE;CRYSTAL DEFECTS;ADSORPTION;DANGLING BONDS;ELECTRONIC STRUCTURE;AB INITIO CALCULATIONS;DENSITY FUNCTIONAL METHOD;Si

 

数据来源: AIP

 

摘要:

We report results of scanning tunneling microscope measurements andabinitiocalculations for Si(113). This surface is of general interest: Ge islands on Si(001) and Si(111) have (113) facets, Si(113) is thermally stable despite its high index, and it has properties of a good substrate. We bring into focus the peculiar atomic structure of Si(113) which contains a novel structural unit built around a subsurface interstitial atom. Such interstitials may be present also at other surfaces, particularly at steps, and may play an important role in atomic diffusion in the subsurface layer. The interstitials aresixfoldcoordinated; this unexpected result disturbs the simple picture of reconstruction driven by rebonding of dangling bonds. Our calculations indicate that the interstitials are released when the surface dangling orbitals rebond, e.g., as the result of adsorption of atomic hydrogen or during epitaxial growth.

 

点击下载:  PDF (221KB)



返 回