A liquid sensor based on a shear horizontal saw device
作者:
Jun Kondoh,
Showko Shiokawa,
期刊:
Electronics and Communications in Japan (Part II: Electronics)
(WILEY Available online 1993)
卷期:
Volume 76,
issue 2
页码: 69-82
ISSN:8756-663X
年代: 1993
DOI:10.1002/ecjb.4420760208
出版商: Wiley Subscription Services, Inc., A Wiley Company
关键词: SH‐SAW device;liquid SAW sensor;viscosity effect;mass loading effect;electrical perturbation
数据来源: WILEY
摘要:
AbstractThe surface acoustic wave (SAW) changes its propagation characteristic if the region above the propagation surface is altered. This phenomenon can be used for realization of an SAW sensor. The Rayleigh mode known as a general SAW can be used as a gas phase sensor. If, however, the propagation surface is loaded with liquid, a longitudinal wave is radiated into the liquid and the Rayleigh wave decays. Hence, this wave cannot be used for a liquid sensor.To realize a liquid sensor, the SH mode must be used in which the particle displacement is normal to the propagation direction and parallel to the propagation surface. It has been reported that the SAWs propagating on piezoelectric crystals such as 36° rotated Y‐cut X propagation LiTaO3and X‐cut 150° propagation LiTaO3are SH‐mode SAWs (SH‐SAW).In this paper, it is found theoretically and experimentally that the shear horizontal‐ (SH‐) SAW devices using these piezoelectric crystal cannot only detect the mechanical effects such as the viscosity of the liquid and the mass loading in the liquid but also the electrical effects such as the permittivity and conductivity of the liquid. By way of comparison with other liquid sensors using high‐frequency ultrasonic devices, the characteristics of the SH‐SAW sens
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