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Simple stress formula for multilayered thin films on a thick substrate

 

作者: J. Vilms,   D. Kerps,  

 

期刊: Journal of Applied Physics  （AIP Available online 1982）
卷期: Volume 53, issue 3  

页码: 1536-1537

 

ISSN:0021-8979

 

年代: 1982

 

DOI:10.1063/1.330653

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A simple formula for stress produced by differential thermal contraction in a multilayered structure composed of thin layers on a thick substrate is derived. Formulas for bending radius and substrate stress are also given. Numerical results agree with more complicated calculations of prior work.

 

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