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Microfabrication of molecular scale microstructures

 

作者: H. W. Deckman,   B. Abeles,   J. H. Dunsmuir,   C. B. Roxlo,  

 

期刊: Applied Physics Letters  （AIP Available online 1987）
卷期: Volume 50, issue 9  

页码: 504-506

 

ISSN:0003-6951

 

年代: 1987

 

DOI:10.1063/1.98158

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Microfabrication techniques have been used to prepare a new class of molecular scale microporous materials. These materials are formed by chemically etching slots into alternate layers of a lithographically exposed amorphous superlattice cross section. The slot width is accurately controllable from 10 A˚ to more than 500 A˚.

 

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