The growth of epitaxial layers with an improved LPE apparatus

 

作者: C. Heinz,   W. Schmidt auf Altenstadt,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  （AIP Available online 1984）
卷期: Volume 2, issue 2  

页码: 154-155

 

ISSN:0734-211X

 

年代: 1984

 

DOI:10.1116/1.582767

 

出版商: American Vacuum Society

 

关键词: liquid phase epitaxy;epitaxial layers;furnaces;fabrication;design;gallium antimonides;aluminium antimonides

 

数据来源: AIP

 

 

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