High‐resolution spectroscopy of protons incident under nonchanneling condition and scattered by 12° on Pd‐ and Au‐deposited Si(111) surfaces has been employed for direct layer‐by‐layer analysis of the depth distribution of Au and Pd. For nearly monolayer deposition at room temperature, most of the Au atoms are found to remain on the silicon surface, while the Pd atoms are found to be distributed over the two layers, with the palladium composition not exceeding that of Pd2Si. We also found that the most probable energy loss of protons scattered from the Au‐deposited surface is sensitive to the depth of the Au atoms on the surface.