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Ion-implanted integrated optical waveguides in lithium niobate

 

作者: J.M.Naden,   B.L.Weiss,  

 

期刊: Radio and Electronic Engineer  (IET Available online 1984)
卷期: Volume 54, issue 5  

页码: 227-230

 

年代: 1984

 

DOI:10.1049/ree.1984.0056

 

出版商: IERE

 

数据来源: IET

 

摘要:

The role of ion implantation in the fabrication of optical waveguides in lithium niobate is describedtogether with a review of work carried out in this field. In addition the waveguide structure and the process parameters which determine its characteristics are outlined. Finally, the implications of this technology forthe fabrication of more complex integrated optical devices are discussed.

 

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