Ion-implanted integrated optical waveguides in lithium niobate
作者:
J.M.Naden,
B.L.Weiss,
期刊:
Radio and Electronic Engineer
(IET Available online 1984)
卷期:
Volume 54,
issue 5
页码: 227-230
年代: 1984
DOI:10.1049/ree.1984.0056
出版商: IERE
数据来源: IET
摘要:
The role of ion implantation in the fabrication of optical waveguides in lithium niobate is describedtogether with a review of work carried out in this field. In addition the waveguide structure and the process parameters which determine its characteristics are outlined. Finally, the implications of this technology forthe fabrication of more complex integrated optical devices are discussed.
点击下载:
PDF
(582KB)
返 回