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SIMS with a standard quadrupole residual gas analyzer

 

作者: G. E. Thomas,   E. E. de Kluizenaar,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1974）
卷期: Volume 45, issue 3  

页码: 457-458

 

ISSN:0034-6748

 

年代: 1974

 

DOI:10.1063/1.1686660

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A standard quadrupole residual gas analyzer can be used to measure secondary ion mass spectra (SIMS) if, between the sample and the entrance to the quadrupole rod system, the energy of the sputtered ions is modulated so as to produce an intensity modulation of only the low energy ions and the signal is recorded using a tuned ac amplifier.

 

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