Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever
作者:
B. W. Chui,
T. W. Kenny,
H. J. Mamin,
B. D. Terris,
D. Rugar,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 72,
issue 11
页码: 1388-1390
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.121064
出版商: AIP
数据来源: AIP
摘要:
A dual-axis atomic force microscope (AFM) cantilever with independent piezoresistive sensors has been developed for simultaneous detection of vertical and lateral forces. The cantilever consists of a flat, triangular probe connected to a base by four tall, narrow ribs. The vertically compliant triangular probe and the laterally compliant ribs incorporate separate piezoresistors for vertical and lateral force sensing. In the fabrication process, a special oblique ion implant technique is used to produce electrical elements on vertical sidewalls and horizontal surfaces of the cantilever structure at the same time. The dual-axis cantilever has been used to perform microfriction measurements as well as obtain simultaneous vertical-force and lateral-force AFM images. ©1998 American Institute of Physics.
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