Organometallic chemical vapor deposition of InP/InGaAsP on nonplanar InP substrates: Application to multiple quantum well lasers
作者:
R. Bhat,
E. Kapon,
J. Werner,
D. M. Hwang,
N. G. Stoffel,
M. A. Koza,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 56,
issue 9
页码: 863-865
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.102665
出版商: AIP
数据来源: AIP
摘要:
We report the growth of InGaAs and InGaAsP quantum well heterostructures on InP substrates with [011¯] oriented grooves. We have shown that growth of these materials on non‐planar substrates can result in lattice‐mismatched layers on orientations other than (100) which in some cases gives rise to dislocations. In addition, the lateral patterning of quantum wells and quantum wire‐like structures has been demonstrated in this material system. Finally, a quantum well laser, wherein lateral patterning of the well thickness was achieved by growing in a flat‐bottomed groove, was fabricated. Without any additional growth steps these lasers exhibit a single stable spatial mode due to the waveguide formed at the groove.
点击下载:
PDF
(328KB)
返 回