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GaAs metal‐semiconductor field‐effect transistor with extremely low resistance nonalloyed ohmic contacts using an InAs/GaAs superlattice

 

作者: N. S. Kumar,   J.‐I. Chyi,   C. K. Peng,   H. Morkoc¸,  

 

期刊: Applied Physics Letters  (AIP Available online 1989)
卷期: Volume 55, issue 8  

页码: 775-776

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.101803

 

出版商: AIP

 

数据来源: AIP

 

摘要:

GaAs metal‐semiconductor field‐effect transistors (MESFETs) with extremely low resistance nonalloyed ohmic contacts have been demonstrated. The contact structure consists of ann+‐InAs/GaAs strained‐layer superlattice and an InAs cap layer. Contact resistances as low as 0.036 &OHgr; mm have been measured. These results represent the smallest figures reported to date for GaAs field‐effect transistors. Nonalloyed MESFETs with 1 &mgr;m gate lengths had transconductances of about 210 mS/mm.

 

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