GaAs metal‐semiconductor field‐effect transistor with extremely low resistance nonalloyed ohmic contacts using an InAs/GaAs superlattice
作者:
N. S. Kumar,
J.‐I. Chyi,
C. K. Peng,
H. Morkoc¸,
期刊:
Applied Physics Letters
(AIP Available online 1989)
卷期:
Volume 55,
issue 8
页码: 775-776
ISSN:0003-6951
年代: 1989
DOI:10.1063/1.101803
出版商: AIP
数据来源: AIP
摘要:
GaAs metal‐semiconductor field‐effect transistors (MESFETs) with extremely low resistance nonalloyed ohmic contacts have been demonstrated. The contact structure consists of ann+‐InAs/GaAs strained‐layer superlattice and an InAs cap layer. Contact resistances as low as 0.036 &OHgr; mm have been measured. These results represent the smallest figures reported to date for GaAs field‐effect transistors. Nonalloyed MESFETs with 1 &mgr;m gate lengths had transconductances of about 210 mS/mm.
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