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High‐field drift velocity of electrons at the Si–SiO2interface as determined by a time‐of‐flight technique

 

作者: J. A. Cooper,   D. F. Nelson,  

 

期刊: Journal of Applied Physics  (AIP Available online 1983)
卷期: Volume 54, issue 3  

页码: 1445-1456

 

ISSN:0021-8979

 

年代: 1983

 

DOI:10.1063/1.332170

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We describe a new technique for the study of high‐field transport at semiconductor–insulator interfaces. In this technique, we observe the time‐of‐flight of discrete charge packets introduced by a pulsed laser. The packets drift in a region of uniform applied tangential field at the interface. We present data on the room temperature drift velocity of electrons at the interface between (100) silicon and thermally grown silicon dioxide as a function of both tangential and normal electric fields. We observe velocities near saturation of 8.9×106cm/s at a tangential field of 4 V/&mgr;m and a normal field of 9 V/&mgr;m, and extrapolate to a saturation velocity of 9.2×106cm/s independent of normal field. This value is more than 40% higher than reported by early workers, and is close to the saturation velocity observed in bulk silicon.

 

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