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Noncontact, 1 °C resolution temperature measurement by projection moiré interferometry

 

作者: Saleem H. Zaidi,   S. R. J. Brueck,   J. R. McNeil,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1992)
卷期: Volume 10, issue 1  

页码: 166-169

 

ISSN:1071-1023

 

年代: 1992

 

DOI:10.1116/1.586291

 

出版商: American Vacuum Society

 

关键词: TEMPERATURE MEASUREMENT;GRATINGS;MOIRE FRINGES;SENSITIVITY;WAFERS;THERMAL EXPANSION;LASER BEAMS

 

数据来源: AIP

 

摘要:

A rapid, inexpensive temperature measurement scheme, applicable across a broad temperature range, based on noncontact measurement of the expansion of a grating structure on the surface of interest is demonstrated. A simple projection moiré technique is used to remotely determine the grating periodicity and, hence, the temperature. An optical Fourier transform technique is introduced to simplify the analysis. A sensitivity of ±0.5 °C for a grating length of 6 mm in a Si wafer around room temperature is demonstrated.

 

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