Noncontact, 1 °C resolution temperature measurement by projection moiré interferometry
作者:
Saleem H. Zaidi,
S. R. J. Brueck,
J. R. McNeil,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1992)
卷期:
Volume 10,
issue 1
页码: 166-169
ISSN:1071-1023
年代: 1992
DOI:10.1116/1.586291
出版商: American Vacuum Society
关键词: TEMPERATURE MEASUREMENT;GRATINGS;MOIRE FRINGES;SENSITIVITY;WAFERS;THERMAL EXPANSION;LASER BEAMS
数据来源: AIP
摘要:
A rapid, inexpensive temperature measurement scheme, applicable across a broad temperature range, based on noncontact measurement of the expansion of a grating structure on the surface of interest is demonstrated. A simple projection moiré technique is used to remotely determine the grating periodicity and, hence, the temperature. An optical Fourier transform technique is introduced to simplify the analysis. A sensitivity of ±0.5 °C for a grating length of 6 mm in a Si wafer around room temperature is demonstrated.
点击下载:
PDF
(340KB)
返 回