Ion‐beam‐induced epitaxial crystallization kinetics in ion implanted GaAs
作者:
S. T. Johnson,
J. S. Williams,
E. Nygren,
R. G. Elliman,
期刊:
Journal of Applied Physics
(AIP Available online 1988)
卷期:
Volume 64,
issue 11
页码: 6567-6569
ISSN:0021-8979
年代: 1988
DOI:10.1063/1.342029
出版商: AIP
数据来源: AIP
摘要:
Thin amorphous GaAs layers on (100)‐oriented substrates, generated by Si+ion bombardment at 77 K, have been observed to recrystallize epitaxially during 1.5‐MeV Ne+bombardment in the temperature range 75–135 °C. Crystallization proceeds linearly with increasing ion fluence, except in the near‐surface region, and the process is characterized by an activation energy of 0.16 eV, which is an order of magnitude smaller than that obtained for conventional thermal annealing at much higher temperatures.
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