Self-consistent simulation of a planar electron-cyclotron-wave-resonance discharge
作者:
Ralf Krimke,
Herbert M. Urbassek,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 81,
issue 11
页码: 7163-7169
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.365314
出版商: AIP
数据来源: AIP
摘要:
A discharge heated inductively by resonant absorption of electron cyclotron waves discharge is modeled in a planar geometry. The simulation algorithm is based on a kinetic particle-in-cell (PIC/MC) simulation of the plasma properties; the electromagnetic field is calculated macroscopically using the Appleton–Hartree theory for the dielectric tensor. The results are checked against a simplified analytical theory and experimental data by B. Pfeiffer [J. Appl. Phys.37, 1624,1628 (1966)] for a 15 mTorr argon discharge. As a result, we show that an inhomogeneous density profile in the discharge strongly affects the electromagnetic fields in the plasma. Power deposition is calculated both in and outside of the resonance. ©1997 American Institute of Physics.
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