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Precise temperature control for growth of silicon crystals

 

作者: S. P. Lee,   J. T. Lue,   Y. T. Yang,   H. Y. Yu,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1976）
卷期: Volume 47, issue 1  

页码: 72-73

 

ISSN:0034-6748

 

年代: 1976

 

DOI:10.1063/1.1134495

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An automatic temperature controller for a three‐phase, grid‐controlled induction furnace, which can maintain the oven temperature at the silicon melting point with a stability of ±0.4 °C for 2 h of operation, has been described.

 

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