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On the sputtering of binary compounds

 

作者: P. K. Haff,   Z. E. Switkowski,  

 

期刊: Applied Physics Letters  (AIP Available online 1976)
卷期: Volume 29, issue 9  

页码: 549-551

 

ISSN:0003-6951

 

年代: 1976

 

DOI:10.1063/1.89180

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A simple physical model is presented to describe some aspects of the sputtering of compound targets. In particular, expressions are developed for the partial sputtering yields for binary systems in terms of the elemental sputtering rates, the stoichiometric concentrations, and surface binding energy. The partial yields depend nonlinearly on the bulk target concentrations. Comparison of the theoretical predictions with the data on sputtering of PtSi, NiSi, and Cu3Au indicates that the general features are well described.

 

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