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Hot-carrier-induced modifications to the noise performance of polycrystalline silicon thin-film transistors

 

作者: S. Giovannini,   R. Carluccio,   L. Mariucci,   A. Pecora,   G. Fortunato,   C. Reita,   F. Plais,   D. Pribat,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 9  

页码: 1216-1218

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.119855

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Modifications of noise performances induced by hot-carrier degradation in polycrystalline silicon thin-film transistors, made by excimer laser crystallization, are presented. In particular, the normalized drain current spectral density of these devices shows an evident1/fbehavior, and as the device characteristics are degraded by prolonged bias stressing, the noise performances worsen. Hot-carrier degradation results in the formation of both interface states, that have been evaluated through the analysis of the sheet conductance, as well as of oxide traps near the insulator/semiconductor interface, as evidenced by the1/fnoise measurements. A strong correlation between interface state and oxide trap densities has been found, suggesting a common origin for the generation mechanism of the two types of defects. ©1997 American Institute of Physics.

 

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