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Ion‐matrix sheath in a cylindrical bore

 

作者: T. E. Sheridan,  

 

期刊: Journal of Applied Physics  (AIP Available online 1993)
卷期: Volume 74, issue 8  

页码: 4903-4906

 

ISSN:0021-8979

 

年代: 1993

 

DOI:10.1063/1.354323

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The potential structure, electric field, and sheath width for the ion‐matrix sheath in a cylindrical bore are calculated. The appropriate scaling length for this problem is found to be &sqrt;2 times larger than the planar ion matrix sheath width. If the radius of the bore is less than this scaling length, then the sheaths from ‘‘opposite’’ sides of the bore overlap, and the potential drop from the axis to the sidewalls decreases with the square of the bore radius. This limits the maximum energy of ions impacting the target. For bores larger than this scaling length, the asymptotic planar solutions are rapidly approached.  

 

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