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Instrument combining x‐ray photoelectron spectroscopy and secondary ion mass spectrometry for surface studies

 

作者: R. W. Hewitt,   A. T. Shepard,   W. E. Baitinger,   N. Winograd,   W. N. Delgass,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1979)
卷期: Volume 50, issue 11  

页码: 1386-1390

 

ISSN:0034-6748

 

年代: 1979

 

DOI:10.1063/1.1135719

 

出版商: AIP

 

数据来源: AIP

 

摘要:

X‐ray Photoelectron Spectroscopy (XPS) or (ESCA) and Secondary Ion Mass Spectrometry (SIMS) have been combined in the same ultrahigh vacuum system to facilitate a new approach to studying clean and reacted surfaces. The design philosophy is to connect two satellite vacuum systems via a set of magnetically driven sample transfer devices. The advantages and capabilities of this approach are discussed with respect to its flexibility and its ability to couple to other surface techniques. XPS and static SIMS spectra of an oxidized polycrystalline indium film are presented to exemplify the type of information which can be gleaned from a multitechnique investigation of surfaces. The additional ability to prepare sample surfaces in our system by ion implantation is demonstrated by a positive‐ion SIMS analysis of a gold‐implanted aluminum foil.

 

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