Ion energy and plasma characterization in a silicon filtered cathodic vacuum arc
作者:
M. M. M. Bilek,
M. Chhowalla,
M. Weiler,
W. I. Milne,
期刊:
Journal of Applied Physics
(AIP Available online 1996)
卷期:
Volume 79,
issue 3
页码: 1287-1291
ISSN:0021-8979
年代: 1996
DOI:10.1063/1.362654
出版商: AIP
数据来源: AIP
摘要:
The plasma generated by a silicon filtered cathodic vacuum arc has been investigated using a Faraday cup and Langmuir probes. Ion energy distributions for arc currents ranging from 30 to 80 A were measured. Mean ion energies were found to range from 8 to 18 eV. The ion saturation current density varied from 0.1 to 1 mA/cm2depending on both the arc and filter coil currents. The energy distributions were fitted by a sum of Gaussians spaced according to the gas dynamic model for ion acceleration at the cathode spot. ©1996 American Institute of Physics.
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