Air as an adjustable insulator forC‐VandG‐Vanalysis of semiconductor surfaces
作者:
John Moreland,
Jeff Drucker,
P. K. Hansma,
Jo¨rg P. Kotthaus,
Arnold Adams,
R. Kvaas,
期刊:
Applied Physics Letters
(AIP Available online 1984)
卷期:
Volume 45,
issue 1
页码: 104-106
ISSN:0003-6951
年代: 1984
DOI:10.1063/1.95003
出版商: AIP
数据来源: AIP
摘要:
An adjustable metal‐air‐semiconductor capacitor was fabricated using a Pb disk suspended 1700–3600 A˚ above ann‐type Si 〈111〉 surface. Experimental differential capacitance versus voltage and differential conductance versus voltage curves are similar to those previously obtained for metal‐oxide‐semiconductor capacitors.
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