Micromachined two-dimensional array piezoelectrically actuated transducers
作者:
Go¨khan Perc¸in,
Abdullah Atalar,
F. Levent Degertekin,
Butrus T. Khuri-Yakub,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 72,
issue 11
页码: 1397-1399
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.121067
出版商: AIP
数据来源: AIP
摘要:
This letter presents micromachined two-dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report on an optimum design for an individual array element based on finite element modeling. We manufacture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz. Such an array could be combined with on-board driving and an addressing circuitry for different applications. ©1998 American Institute of Physics.
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