首页   按字顺浏览 期刊浏览 卷期浏览 Micromachined two-dimensional array piezoelectrically actuated transducers
Micromachined two-dimensional array piezoelectrically actuated transducers

 

作者: Go¨khan Perc¸in,   Abdullah Atalar,   F. Levent Degertekin,   Butrus T. Khuri-Yakub,  

 

期刊: Applied Physics Letters  (AIP Available online 1998)
卷期: Volume 72, issue 11  

页码: 1397-1399

 

ISSN:0003-6951

 

年代: 1998

 

DOI:10.1063/1.121067

 

出版商: AIP

 

数据来源: AIP

 

摘要:

This letter presents micromachined two-dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report on an optimum design for an individual array element based on finite element modeling. We manufacture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz. Such an array could be combined with on-board driving and an addressing circuitry for different applications. ©1998 American Institute of Physics.

 

点击下载:  PDF (1459KB)



返 回