Experimental validation of a direct simulation by Monte Carlo molecular gas flow model
作者:
P. K. Shufflebotham,
T. J. Bartel,
B. Berney,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1995)
卷期:
Volume 13,
issue 4
页码: 1862-1866
ISSN:1071-1023
年代: 1995
DOI:10.1116/1.587825
出版商: American Vacuum Society
关键词: VACUUM SYSTEMS;PLASMA PRESSURE;NITROGEN;GAS FLOW;COMPUTERIZED SIMULATION;MONTE CARLO METHOD;PRESSURE MEASUREMENT;SPATIAL RESOLUTION;AXIAL SYMMETRY
数据来源: AIP
摘要:
The Sandia direct simulation Monte Carlo (DSMC) molecular/transition gas flow simulation code has significant potential as a computer‐aided design tool for the design of vacuum systems in low pressure plasma processing equipment. The purpose of this work was to verify the accuracy of this code through direct comparison to experiment. To test the DSMC model, a fully instrumented, axisymmetric vacuum test cell was constructed, and spatially resolved pressure measurements made in N2at flows from 50 to 500 sccm. In a ‘‘blind’’ test, the DSMC code was used to model the experimental conditions directly, and the results compared to the measurements. It was found that the model predicted all the experimental findings to a high degree of accuracy. Only one modeling issue was uncovered. The axisymmetric model showed localized low pressure spots along the axis next to surfaces. Although this artifact did not significantly alter the accuracy of the results, it did add noise to the axial data.
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