New method for determination of geometric dependences of submicrometre MOS transistor parameters
作者:
C.P.Wan,
B.J.Sheu,
期刊:
IEE Proceedings G (Circuits, Devices and Systems)
(IET Available online 1990)
卷期:
Volume 137,
issue 4
页码: 275-278
年代: 1990
DOI:10.1049/ip-g-2.1990.0042
出版商: IEE
数据来源: IET
摘要:
A new and simple method using device simulation results to determine the geometric dependences of the zero-bias threshold voltage and body-effect coefficient for submicrometre MOS transistors is presented. Noa priorigeometric shape of the bulk depletion region is assumed. The threshold-voltage reduction and body-effect coefficient were experimentally determined to have a linear and exponential dependence on 1/Leff, respectively, for submicrometre LDD MOS transistors with effective channel length as small as 0.22 μm.
点击下载:
PDF
(383KB)
返 回