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Electromagnetic field structure in a weakly collisional inductively coupled plasma

 

作者: V. A. Godyak,   R. B. Piejak,  

 

期刊: Journal of Applied Physics  (AIP Available online 1997)
卷期: Volume 82, issue 12  

页码: 5944-5947

 

ISSN:0021-8979

 

年代: 1997

 

DOI:10.1063/1.366496

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Two-dimensional, phase resolved magnetic probe measurements have been performed in a low pressure inductively coupled cylindrical plasma source driven with a planar coil. The rf electric field and current density distributions determined from these measurements exhibit an abnormal nonmonotonic spatial evolution. Formation of a second current layer, phase bifurcation and a reversal of the rf field phase velocity have been found and are attributed to spatial dispersion of the plasma conductivity due to collisionless electron thermal motion typical of anomalous skin effect. ©1997 American Institute of Physics.

 

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