Plastic flow during thermal oxidation of silicon
作者:
C. S. Rafferty,
L. Borucki,
R. W. Dutton,
期刊:
Applied Physics Letters
(AIP Available online 1989)
卷期:
Volume 54,
issue 16
页码: 1516-1518
ISSN:0003-6951
年代: 1989
DOI:10.1063/1.101384
出版商: AIP
数据来源: AIP
摘要:
Is silicon dioxide a viscous liquid or an elastic solid at silicon processing temperatures? Simple calculations using either assumption lead to gross discrepancies with experimental observations. This letter shows that a plastic flow model resolves these discrepancies. Flow develops much sooner than predicted by a linear viscoelastic model. Large deformations (<5%) are accommodated almost entirely by plastic flow. Small deformations are accommodated either elastically or by plastic flow depending on temperature.
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