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Plastic flow during thermal oxidation of silicon

 

作者: C. S. Rafferty,   L. Borucki,   R. W. Dutton,  

 

期刊: Applied Physics Letters  (AIP Available online 1989)
卷期: Volume 54, issue 16  

页码: 1516-1518

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.101384

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Is silicon dioxide a viscous liquid or an elastic solid at silicon processing temperatures? Simple calculations using either assumption lead to gross discrepancies with experimental observations. This letter shows that a plastic flow model resolves these discrepancies. Flow develops much sooner than predicted by a linear viscoelastic model. Large deformations (<5%) are accommodated almost entirely by plastic flow. Small deformations are accommodated either elastically or by plastic flow depending on temperature.

 

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