Effect of nitridation on the density of interface states in W–Ti/n‐GaAs Schottky diodes
作者:
H. Chen,
L. P. Sadwick,
M. Sokolich,
K. L. Wang,
R. D. Larson,
T. Y. Chi,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1989)
卷期:
Volume 7,
issue 5
页码: 1096-1102
ISSN:0734-211X
年代: 1989
DOI:10.1116/1.584557
出版商: American Vacuum Society
关键词: NITRIDATION;INTERFACE STATES;TUNGSTEN;TITANIUM;GALLIUM ARSENIDES;SCHOTTKY BARRIER DIODES;SURFACE PROPERTIES;METAL−SEMICONDUCTOR CONTACTS;MASS SPECTROSCOPY;RUTHERFORD SCATTERING;SPUTTERING;GaAs
数据来源: AIP
摘要:
The effective density of interface states that exist at the metal–semiconductor Schottky barrier formed between W–Ti and silicon implanted (n‐type) GaAs has been characterized using forward‐biased capacitance–voltage (C–V) measurements. The Schottky diodes were fabricated by sputtering from a tungsten titanium target under different nitrogen gas ambients of 0%, 6%, and 12%. The nitrogen incorporation and interface stability were verified by secondary ion mass spectroscopy (SIMS) and Rutherford backscattering (RBS). The results of this study clearly show that the lowest effective density of interface states was obtained for the highest nitrogen ambient of 12% at a deposition rate of 10 nm/min.
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