Three‐anode accelerating lens system for the field emission scanning electron microscope
作者:
Katsuhiro Kuroda,
Hirotaka Ebisui,
Tatsuro Suzuki,
期刊:
Journal of Applied Physics
(AIP Available online 1974)
卷期:
Volume 45,
issue 5
页码: 2336-2342
ISSN:0021-8979
年代: 1974
DOI:10.1063/1.1663587
出版商: AIP
数据来源: AIP
摘要:
The characteristics of an accelerating lens system composed of three anodes in the scanning electron microscope are described. The main advantages of this accelerating lens system are that the working distance can be changed freely or the accelerating voltage can be changed over a wide range (about 0.3–100 kV) without changing the working distance, by adjusting only the control voltage of the second anode. Some problems in the manufacturing and operating conditions are also discussed.
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