首页   按字顺浏览 期刊浏览 卷期浏览 Three‐anode accelerating lens system for the field emission scanning electron mi...
Three‐anode accelerating lens system for the field emission scanning electron microscope

 

作者: Katsuhiro Kuroda,   Hirotaka Ebisui,   Tatsuro Suzuki,  

 

期刊: Journal of Applied Physics  (AIP Available online 1974)
卷期: Volume 45, issue 5  

页码: 2336-2342

 

ISSN:0021-8979

 

年代: 1974

 

DOI:10.1063/1.1663587

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The characteristics of an accelerating lens system composed of three anodes in the scanning electron microscope are described. The main advantages of this accelerating lens system are that the working distance can be changed freely or the accelerating voltage can be changed over a wide range (about 0.3–100 kV) without changing the working distance, by adjusting only the control voltage of the second anode. Some problems in the manufacturing and operating conditions are also discussed.

 

点击下载:  PDF (377KB)



返 回